Mapping of integrated PIN diodes with a 3D architecture by scanning microwave impedance microscopy and dynamic spectroscopy
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منابع مشابه
Application Note #145 Nanoscale Mapping of Permittivity and Conductivity with Scanning Microwave Impedance Microscopy
is an AFM-based technique for materials and device characterization. The reflected microwave signal from the tip-sample interface holds information of the electrodynamic properties of the sample surface underneath the tip apex. Detecting and processing of the reflectance in real time allows sMIM to directly access the permittivity and conductivity of materials. When an AFM-type sMIM probe is sc...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2020
ISSN: 2190-4286
DOI: 10.3762/bjnano.11.159